Fabrication of injection-molded diffuser micropumps

Cheng-Hsien Wu; Wei-Chieh Hsu

doi:10.1117/12.582419

23 February 2005 Fabrication of injection-molded diffuser micropumps

Cheng-Hsien Wu, Wei-Chieh Hsu

Proceedings Volume 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II; (2005) https://doi.org/10.1117/12.582419
Event: Smart Materials, Nano-, and Micro-Smart Systems, 2004, Sydney, Australia

Abstract

A problem with micromechanics is that the commonly used fabrication methods and materials are relatively expensive. To be competitive on the market, new low-cost materials and manufacturing methods are necessary. Different micro-devices have already been made, e.g., micropumps. Micro-replication also enables different materials like polymers, metals and ceramics to be used. The research was conducted through part design, mold fabrication, experimental analysis, and quality test. The process parameters including injection speed, melt temperature, mold temperature and packing pressure on quality of micropumps were investigated. The injection molded part was actuated by a piezoelectric disc. Flow test was conducted to check the micropump performance.

Citation Download Citation

Cheng-Hsien Wu and Wei-Chieh Hsu "Fabrication of injection-molded diffuser micropumps", Proc. SPIE 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, (23 February 2005); https://doi.org/10.1117/12.582419

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