Microfabrication of glass plates by nanosecond FHG Nd:YAG laser

Susumu Nakamura; Shigeyuki Tanaka; Yoshiro Ito

doi:10.1117/12.596289

8 October 2004 Microfabrication of glass plates by nanosecond FHG Nd:YAG laser

Susumu Nakamura, Shigeyuki Tanaka, Yoshiro Ito

Proceedings Volume 5662, Fifth International Symposium on Laser Precision Microfabrication; (2004) https://doi.org/10.1117/12.596289
Event: Fifth International Symposium on Laser Precision Microfabrication, 2004, Nara, Japan

Abstract

We have investigated about machining of glass plates by a UV laser, a nanosecond FHG Nd:YAG laser. Laser wavelength was 266 nm and pulse width was about 4 - 6 ns. Repetition rate of the laser pulse was up to 30Hz. Borosilicate glass plate of 1 mm thick was irradiated by laser pulse in air. An X-Y axis precision trnaslation stage was used to change the laser irradiation spot on the glass surface. The spot size of focusing beam at the glass surface was varied by changing the distance between the glass and a focal lens. Focal position of the focal lens was determined by measuring burn patterns on thermo-sensitive paper as a function of distance between the lens and the paper. When the glass plate was placed at the focal point, radial cracks occurred on the surface. When the glass plate was moved toward the lens by 0.7 mm, ablation still took place and provided good quality groove on the surface with no significant cracks. The cross section of the groove was conical for slower scanning speed while it became shallow dip with rather flat bottom for faster scan speed. The grove depth increased linearly as the laser fluence increased.

Citation Download Citation

Susumu Nakamura, Shigeyuki Tanaka, and Yoshiro Ito "Microfabrication of glass plates by nanosecond FHG Nd:YAG laser", Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); https://doi.org/10.1117/12.596289

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