Effect of UV-irradiation on sol-gel optical films

Fan Yang; Jun Shen; Qi Sun; Bin Zhou; Guangming Wu; Jacques Mugnier

doi:10.1117/12.668123

1 February 2006 Effect of UV-irradiation on sol-gel optical films

Fan Yang, Jun Shen, Qi Sun, Bin Zhou, Guangming Wu, Jacques Mugnier

Proceedings Volume 6034, ICO20: Optical Design and Fabrication; 603410 (2006) https://doi.org/10.1117/12.668123
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

Sol-Gel optical film was widely used in high power laser system with the development of its preparation technique. Ultraviolet treating is an effective method to solidify the film and improve its performance. In this paper, optical films were deposited on K9, silica glass and silicon wafer substrates by Sol-Gel spin-coating method and ultraviolet light source was produced by 1000W high-pressure mercury lamp to irradiate these optical films. SEM, AFM, IR and ellipsometer were used to characterize the structure and optical properties of the films. Mechanical property of films was measured by pencil hardness-testing device. Laser damage threshold of films was measured by a Q-switched Nd:YAG high power laser whose wavelength was 1064nm and its pulse width 15ns. The results show that UV-irradiation can improve the mechanical property and increase the refractive index of the films. The nodules on the film surface can be changed into pits by UV-irradiation process so the laser damage threshold of Sol-Gel thin films increased. The laser damage threshold of ZrO₂ single-layer film added with PVP reaches 50.6J/cm² (1064 nm, 1 ns) after UV-irradiation process. It was found that UV-irradiation is an effective method to avoid infiltrating between the layers and improve the homogeneity of the multilayer films. The reflection of 5 layers of ZrO₂/SiO₂ multi-layer films is increased more than 10% after UV-irradiation treatment.

Citation Download Citation

Fan Yang, Jun Shen, Qi Sun, Bin Zhou, Guangming Wu, and Jacques Mugnier "Effect of UV-irradiation on sol-gel optical films", Proc. SPIE 6034, ICO20: Optical Design and Fabrication, 603410 (1 February 2006); https://doi.org/10.1117/12.668123

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