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29 December 2005 A unique new microtechnology facility for Australia
H. Barry Harrison
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Proceedings Volume 6035, Microelectronics: Design, Technology, and Packaging II; 603501 (2005) https://doi.org/10.1117/12.637891
Event: Microelectronics, MEMS, and Nanotechnology, 2005, Brisbane, Australia
Abstract
The Queensland Microtechnology Facility is an initiative of the Queensland Government in conjunction with Griffith University. The Queensland Government through its Smart State Research Facilities Funds (SSRFF) is providing funds for equipment to equip a purpose built building provided by the University. The focus of the Facility is on the application of Silicon Carbide on Silicon semiconductor systems. This is an important feature that enables access to the mature silicon technology at the same time providing access the less mature but very promising SiC technology and its properties. These properties include broad bandgap, thus high voltage and high temperature operations, excellent mobilities, very small leakage currents and high thermal conductivity. The QMF is unique in that it will encourage state of the art research with a commercial bias. It will be equipped with custom built equipment to meet the goals of the Facility. Already there are projects directed toward the exploitation of Silicon Carbide on Silicon Technology being undertaken. This paper provides some background to the planning process associated with the realisation of the QMF.
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H. Barry Harrison "A unique new microtechnology facility for Australia", Proc. SPIE 6035, Microelectronics: Design, Technology, and Packaging II, 603501 (29 December 2005); https://doi.org/10.1117/12.637891
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KEYWORDS
Silicon carbide
Silicon
Epitaxy
Microtechnology
Electronics
Semiconducting wafers
Optoelectronic devices
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