EUV imaging with a 13nm tabletop laser reaches sub-38 nm spatial resolution

Georgiy Vaschenko; Fernando Brizuela; Courtney Brewer; Miguel A. Larotonda; Yong Wang; Bradley M. Luther; Mario C. Marconi; Jorge J. Rocca; Carmen S. Menoni; Weilun Chao; Erik H. Anderson; Yanwei Liu; David T. Attwood

doi:10.1117/12.656588

23 March 2006 EUV imaging with a 13nm tabletop laser reaches sub-38 nm spatial resolution

Georgiy Vaschenko, Fernando Brizuela, Courtney Brewer, Miguel A. Larotonda, Yong Wang, Bradley M. Luther, Mario C. Marconi, Jorge J. Rocca, Carmen S. Menoni, Weilun Chao, Erik H. Anderson, Yanwei Liu, David T. Attwood

Author Affiliations +

Proceedings Volume 6151, Emerging Lithographic Technologies X; 61510X (2006) https://doi.org/10.1117/12.656588
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

We have acquired images with sub-38 nm spatial resolution using a tabletop extreme ultraviolet (EUV) imaging system operating at a wavelength of 13.2 nm, which is within the bandwidth of Mo/Si lithography mirrors This zone plate-based, full-field microscope has the power to render images in only several seconds with up to a 10,000 μm² field of view. The ability to acquire such high-resolution images using a compact EUV plasma laser source opens many possibilities for nanotechnology, including in-house actinic inspection of EUV lithography mask blanks.

Citation Download Citation

Georgiy Vaschenko, Fernando Brizuela, Courtney Brewer, Miguel A. Larotonda, Yong Wang, Bradley M. Luther, Mario C. Marconi, Jorge J. Rocca, Carmen S. Menoni, Weilun Chao, Erik H. Anderson, Yanwei Liu, and David T. Attwood "EUV imaging with a 13nm tabletop laser reaches sub-38 nm spatial resolution", Proc. SPIE 6151, Emerging Lithographic Technologies X, 61510X (23 March 2006); https://doi.org/10.1117/12.656588

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available