The measurement of micro-topography surface based on wave cutting interference theory

Mei Hui; Nian-mao Deng

doi:10.1117/12.725460

29 January 2007 The measurement of micro-topography surface based on wave cutting interference theory

Mei Hui, Nian-mao Deng

Proceedings Volume 6279, 27th International Congress on High-Speed Photography and Photonics; 62794V (2007) https://doi.org/10.1117/12.725460
Event: 27th International congress on High-Speed Photography and Photonics, 2006, Xi'an, China

Abstract

This paper proposes the measurement of micro-topography surface based on wave cutting interference theory. This wave cutting interference system realized the differential cutting and complex polarization with beam splitter polarize prism. Math model is established based on matrix analysis. The phase distribution is obtained with equation between intensity and phase from the figure of the light intensity information, the value of micro-topography surface is obtained after data manipulation. Some technical difficulties existed in the surface microscopy are analyzed and solved.

Citation Download Citation

Mei Hui and Nian-mao Deng "The measurement of micro-topography surface based on wave cutting interference theory", Proc. SPIE 6279, 27th International Congress on High-Speed Photography and Photonics, 62794V (29 January 2007); https://doi.org/10.1117/12.725460

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