Research on surface topography of MEMS micromirror based on 3D Weierstrass-Mandelbrot function

Yuan Luo; Yi Zhang; Xiaodong Xu

doi:10.1117/12.725945

29 January 2007 Research on surface topography of MEMS micromirror based on 3D Weierstrass-Mandelbrot function

Yuan Luo, Yi Zhang, Xiaodong Xu

Proceedings Volume 6279, 27th International Congress on High-Speed Photography and Photonics; 62797A (2007) https://doi.org/10.1117/12.725945
Event: 27th International congress on High-Speed Photography and Photonics, 2006, Xi'an, China

Abstract

Micro-mirror is the key structure of MEMS optical switch, Digital Mirror Display (DMD) and variable optical attenuators. Surface roughness plays a crucial rule in reflectivity, insertion loss, and all kinds of surface forces. In this paper, a silicon based non-silicon MEMS optical switch is fabricated and the topographies of various micro-mirror surfaces are measured by Scanning Tunneling Microscope (STM). After fractal analysis, a three-dimensional Weierstrass-Mandelbrot function is applied to simulate the topography of different surfaces. The result shows that the surface of MEMS micromirror which fabricated by metal sputter has low anisotropism and the W-M function is very efficient in creating models and is very useful in analysis the topography of MEMS surface.

Citation Download Citation

Yuan Luo, Yi Zhang, and Xiaodong Xu "Research on surface topography of MEMS micromirror based on 3D Weierstrass-Mandelbrot function", Proc. SPIE 6279, 27th International Congress on High-Speed Photography and Photonics, 62797A (29 January 2007); https://doi.org/10.1117/12.725945

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available