Mechanical-electrostatic coupling research for MEMS line vibration gyroscope

Qiufen Guo; Feng Sun; Lin Zhao; Yueyang Ben

doi:10.1117/12.717504

28 October 2006 Mechanical-electrostatic coupling research for MEMS line vibration gyroscope

Qiufen Guo, Feng Sun, Lin Zhao, Yueyang Ben

Proceedings Volume 6358, Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation; 635809 (2006) https://doi.org/10.1117/12.717504
Event: Sixth International Symposium on Instrumentation and Control Technology, 2006, Beijing, China

Abstract

MEMS line vibration gyroscope is one of the most extensive applications of the MEMS gyroscope now. Its driving mode is always the electrostatic. When the MEMS line vibration gyroscope works in normal mode, its mass is vibrated in line at one direction (it is x direction here) and detected the rotation speed at other direction ( it is y direction here) in horizontal. At this time, the mass is in balance at y direction. But when the configuration of the MEMS line vibration gyroscope is not asymmetry, the electrostatic that putted on the mass at y direction is destroyed. So the mass is vibrated in line at y direction. The MEMS line vibration gyroscope will couple the rotation speed of x direction and produce zero signals because of this movement. Aim at this phenomenon, the mechanical-electrical error model because of the asymmetry of the configuration of the MEMS line vibration gyroscope is built. There is simulation analysis by using Matlab. And according to the method of Limited Element, the distributing fig of the electric field and the electrostatic force because of the asymmetry of the configuration is got by using ANSYS. These researches act important effect on improving the precision of the MEMS line vibration gyroscope.

Citation Download Citation

Qiufen Guo, Feng Sun, Lin Zhao, and Yueyang Ben "Mechanical-electrostatic coupling research for MEMS line vibration gyroscope", Proc. SPIE 6358, Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation, 635809 (28 October 2006); https://doi.org/10.1117/12.717504

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KEYWORDS

Microelectromechanical systems

Gyroscopes

Analytical research

Electrodes

MATLAB

Automatic control

Sensors

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