Toward online non-contact roughness profile measurements with a sensor based on conoscopic holography: current developments

Ignacio Álvarez; Jorge Marina; José M. Enguita; César Fraga; Ricardo García; Guillermo Ojea

doi:10.1117/12.686220

12 October 2006 Toward online non-contact roughness profile measurements with a sensor based on conoscopic holography: current developments

Ignacio Álvarez, Jorge Marina, José M. Enguita, César Fraga, Ricardo García, Guillermo Ojea

Author Affiliations +

Proceedings Volume 6382, Two- and Three-Dimensional Methods for Inspection and Metrology IV; 638202 (2006) https://doi.org/10.1117/12.686220
Event: Optics East 2006, 2006, Boston, Massachusetts, United States

Abstract

On-line non-contact roughness metrology is still an open problem. Usual methods involve either contact (stylus-type devices) or perform indirect evaluations of some roughness parameters, such as R_a, with light scattering techniques or speckle measurement (among the most common optical techniques), inductance (only for magnetic materials) or ultrasound methods. However, a generic method able to obtain every roughness parameter (what means recording the real distance profile), able to work with a variety of surface types, and able to be installed in production lines is still to be developed. In this article, the ongoing work towards the construction of a non-contact optical profile measuring sensor that could be used for roughness measurements is presented. Our approach is based on Conoscopic holography, a common-path interferometric technique which is a good candidate for industrial applications. Current research effort is focused in enhancing accuracy in these systems, by both reducing the coherence of the illuminating source (laser) and changing the hardware and software setup, with the aim of building a sensor able to capture a profile of an object's surface in a single shot with high precision from a relatively long standoff (several cm).

Citation Download Citation

Ignacio Álvarez, Jorge Marina, José M. Enguita, César Fraga, Ricardo García, and Guillermo Ojea "Toward online non-contact roughness profile measurements with a sensor based on conoscopic holography: current developments", Proc. SPIE 6382, Two- and Three-Dimensional Methods for Inspection and Metrology IV, 638202 (12 October 2006); https://doi.org/10.1117/12.686220

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