Fabrication of various metal electrodes on the electro-active paper actuators using soft lithography

H. G. Lim; Jaehwan Kim; K. S. Kang

doi:10.1117/12.695724

8 January 2007 Fabrication of various metal electrodes on the electro-active paper actuators using soft lithography

H. G. Lim, Jaehwan Kim, K. S. Kang

Proceedings Volume 6414, Smart Structures, Devices, and Systems III; 64140S (2007) https://doi.org/10.1117/12.695724
Event: SPIE Smart Materials, Nano- and Micro-Smart Systems, 2006, Adelaide, Australia

Abstract

The cellulose solution dissolved in dimethylacetamide (DMAc) and LiCl was spin-coated to the silicon wafer and removed DMAc solvent using 2-propanol and deionized water. The various metal electrodes were fabricated on the DMAc-cellulose using the following several different soft lithography processes. For the first process, gold electrodes were deposited onto the polydimethylsilane (PDMS). Self-assembly monolayer (SAM) of 3-(mercaptopropyl)trimethoxysilane (MPTMS) were fabricated on the cellulose surface using vacuum deposition method before stamping the gold electrode. Since the cellulose/SAM layer method created nano-defects on the metal electrode, tetrahydrofurane (THF)/MPTMS, toluene/MPTMS, and 2-propanol/MPTMS solution method were utilized for MPTMS SAM layer fabrication. 2-Propanol/MPTMS combination exhibited minimum defects on the metal electrodes. This result may be due to the minimum diffusion of the solvent into the stamp. For the next process, gold electrodes were deposited onto the PDMS stamp, and SAM layer of MPTMS was fabricated on the gold electrodes instead of cellulose paper. This result shows that there was no defect on the metal electrode even on the nano-scale field emission scanning electron microscope (FESEM) images. Liftoff lithography with over-developing process provided high quality metal electrodes surface and edge without nano-scale defects. This modified lithography process opened the new fabrication method of various metal electrodes to the electro-active paper (EAPap).

Citation Download Citation

H. G. Lim, Jaehwan Kim, and K. S. Kang "Fabrication of various metal electrodes on the electro-active paper actuators using soft lithography", Proc. SPIE 6414, Smart Structures, Devices, and Systems III, 64140S (8 January 2007); https://doi.org/10.1117/12.695724

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