Paper
15 May 2007 Mixed metal oxide films as pH sensing materials
Khalil Arshak, Edric Gill, Olga Korostynska, Arousian Arshak
Author Affiliations +
Proceedings Volume 6589, Smart Sensors, Actuators, and MEMS III; 658919 (2007) https://doi.org/10.1117/12.721950
Event: Microtechnologies for the New Millennium, 2007, Maspalomas, Gran Canaria, Spain
Abstract
Due to the demand for accurate, reliable and highly sensitive pH sensors, research is being pursued to find novel materials to achieve this goal. Semiconducting metal oxides, such as TiO, SnO and SnO2 and insulating oxides such as Nb2O5 and Bi2O3, and their mixtures in different proportions are being investigated for this purpose. The films of these materials mixtures are used in conjunction with an interdigitated electrode pattern to produce a conductimetric/capacitive pH sensor. The advantages of this approach include straightforward manufacturing, versatility and cost-effectiveness. It was noted that upon contact with a solution, the electrical parameters of the films, such as resistance etc., change. The correlation of these changes with pH values is the basis for the proposed system development. The ultimate goal is to find materials composition, which would have the highest sensitivity towards the pH level of the solutions. It was found that the materials that produced the highest sensitivity either had a long response time or were unstable over a wide pH range. Those exhibiting lower sensitivities were found to be more stable over a wide pH range. All oxide films tested demonstrated a change in electrical parameters upon contact with buffers of known pH value.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Khalil Arshak, Edric Gill, Olga Korostynska, and Arousian Arshak "Mixed metal oxide films as pH sensing materials", Proc. SPIE 6589, Smart Sensors, Actuators, and MEMS III, 658919 (15 May 2007); https://doi.org/10.1117/12.721950
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KEYWORDS
Oxides

Sensors

Metals

Bismuth

Capacitance

Niobium

Semiconductors

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