Experimental study on femtosecond laser micromaching of grooves in spring steel

Litao Qi; Xuefeng Wu; Yang Wang

doi:10.1117/12.725708

5 March 2007 Experimental study on femtosecond laser micromaching of grooves in spring steel

Litao Qi, Xuefeng Wu, Yang Wang

Proceedings Volume 6595, Fundamental Problems of Optoelectronics and Microelectronics III; 65950R (2007) https://doi.org/10.1117/12.725708
Event: Fundamental Problems of Optoelectronics and Microelectronics III, 2006, Harbin, China

Abstract

Experiments on femtosecond laser micromachining of grooves in spring steel (65Mn) were performed with Ti:Sapphire laser pulses of 5Ofs duration. The relationships between the dimensions of the grooves and the cutting parameters were analyzed. A logarithmic dependence of the groove depth on laser fluence was observed with two regimes characterized by different ablation rates and different thresholds. The groove depth was found to be inversely proportional to cutting speed and proportional to the number of passes. A depth limit was found with decreasing cutting speed or increasing number of passes. Cutting speed and the numbers of passes have little effect on the width of grooves. The morphological of period surface structures and unevenness depth was observed using scanning electron microscope. The result in the paper provides instructive guide for future research on three-dimension microstructures.

Citation Download Citation

Litao Qi, Xuefeng Wu, and Yang Wang "Experimental study on femtosecond laser micromaching of grooves in spring steel", Proc. SPIE 6595, Fundamental Problems of Optoelectronics and Microelectronics III, 65950R (5 March 2007); https://doi.org/10.1117/12.725708

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