Zone plate efficiency measurements with a laser-plasma source

Michael C. Bertilson; Per A. C. Takman; Anders Holmberg; Ulrich Vogt; Hans M. Hertz

doi:10.1117/12.733943

20 September 2007 Zone plate efficiency measurements with a laser-plasma source

Michael C. Bertilson, Per A. C. Takman, Anders Holmberg, Ulrich Vogt, Hans M. Hertz

Proceedings Volume 6705, Advances in X-Ray/EUV Optics and Components II; 67050F (2007) https://doi.org/10.1117/12.733943
Event: Optical Engineering + Applications, 2007, San Diego, California, United States

Abstract

We demonstrate a compact instrument for rapid and accurate measurements of the absolute and local efficiency of soft x-ray zone plates in the water window [M. Bertilson, et al, Rev. Sci. Instrum 78, 026103 (2007)]. The arrangement is based on a new single-line λ = 2.88 nm liquid-nitrogen-jet laser-plasma source. The versatility of the instrument enables micro and condenser zone plates with focal lengths in the range from ~200 μm to ~100 mm to be measured. We demonstrate an accurate local efficiency map of a in-house fabricated micro zone plate. Furthermore, we show how this compact instrument allows rapid feedback to the fabrication process which is important for future improvements.

Citation Download Citation

Michael C. Bertilson, Per A. C. Takman, Anders Holmberg, Ulrich Vogt, and Hans M. Hertz "Zone plate efficiency measurements with a laser-plasma source", Proc. SPIE 6705, Advances in X-Ray/EUV Optics and Components II, 67050F (20 September 2007); https://doi.org/10.1117/12.733943

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