Measurement of atomic hydrogen flow density during GaAs surface cleaning

V. A. Kagadei; E. V. Nefyodtsev; D. I. Proskurovski; S. V. Romanenko

doi:10.1117/12.802357

29 April 2008 Measurement of atomic hydrogen flow density during GaAs surface cleaning

V. A. Kagadei, E. V. Nefyodtsev, D. I. Proskurovski, S. V. Romanenko

Proceedings Volume 7025, Micro- and Nanoelectronics 2007; 70250A (2008) https://doi.org/10.1117/12.802357
Event: Micro- and Nanoelectronics 2007, 2007, Zvenigorod, Russian Federation

Abstract

The eight-channel thin-film resistive sensor of atomic hydrogen which in the automated mode allows to measure hydrogen atoms flow density in atomic-molecular mix in conditions of the low gas pressure (10^-2-10^-4 Pa) and under action of infra-red and visible radiation noises is described. The sensor can be used for measurement of AH flow density distribution on the large cross-section beam, including measurement during GaAs surface cleaning. The measurement range of atoms flow density is 5×10¹³-10¹⁶ at.cm^-2s^-1 and measurement time is 1-10 minutes. The resistor of the sensor is produced by microelectronics planar technology that provides an opportunity of the high space resolution at beam spatial distributions measurement.

Citation Download Citation

V. A. Kagadei, E. V. Nefyodtsev, D. I. Proskurovski, and S. V. Romanenko "Measurement of atomic hydrogen flow density during GaAs surface cleaning", Proc. SPIE 7025, Micro- and Nanoelectronics 2007, 70250A (29 April 2008); https://doi.org/10.1117/12.802357

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available