Divergence instability of an extensible microplate subjected to nonlinear electrostatic pressure

Ghader Rezazadeh; Hadi Yagubizade; Yashar Alizadeh

doi:10.1117/12.802494

29 April 2008 Divergence instability of an extensible microplate subjected to nonlinear electrostatic pressure

Ghader Rezazadeh, Hadi Yagubizade, Yashar Alizadeh

Proceedings Volume 7025, Micro- and Nanoelectronics 2007; 70251F (2008) https://doi.org/10.1117/12.802494
Event: Micro- and Nanoelectronics 2007, 2007, Zvenigorod, Russian Federation

Abstract

An improved mathematical model in order to study mechanical behavior of an extensible microplate subjected to nonlinear electrostatic pressure was presented. In this model, the effect of stretching due to fixed boundary conditions and residual stresses because of fabrication process on static instability of the microplate was studied. The derived nonlinear partial integro-differential governing equation considering stretching and residual stresses effects, using of Step-by-Step Linearization Method (SSLM), was linearized. By applying the finite difference method (FDM) to a rectangular mesh, the linearized equation was discretized. By considering the stretching stresses effect, the present mathematical model shows a highly reasonable prediction of divergence instability as compared with previous existing model. The obtained results show that the residual stresses have considerable effects on Pull-in phenomenon. Axial stresses due to stretching and tensile residual stresses increase pull-in voltage and compressive residual stresses decrease it.

Citation Download Citation

Ghader Rezazadeh, Hadi Yagubizade, and Yashar Alizadeh "Divergence instability of an extensible microplate subjected to nonlinear electrostatic pressure", Proc. SPIE 7025, Micro- and Nanoelectronics 2007, 70251F (29 April 2008); https://doi.org/10.1117/12.802494

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