Carbon nanostructures' catalytic growth from carbonaceous substrates in comparison with PECCVD method

Ye. Yu. Alekseeva; E. A. Il'ichev; V. N. Inkin; D. M. Migunov; G. N. Petruhin; E. A. Poltoratskii; G. S. Rychkov; D. V. Shkodin

doi:10.1117/12.855453

26 February 2010 Carbon nanostructures' catalytic growth from carbonaceous substrates in comparison with PECCVD method

Ye. Yu. Alekseeva, E. A. Il'ichev, V. N. Inkin, D. M. Migunov, G. N. Petruhin, E. A. Poltoratskii, G. S. Rychkov, D. V. Shkodin

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Proceedings Volume 7521, International Conference on Micro- and Nano-Electronics 2009; 75210Z (2010) https://doi.org/10.1117/12.855453
Event: International Conference on Micro- and Nano-Electronics 2009, 2009, Zvenigorod, Russian Federation

Abstract

In this work has been developed the modification of PECCVD method and technology that allows to grow carbon nanostructures of different shape. Also the method for carbon nanostructures' catalytic growth from carbonaceous substrate (CGCS) has been researched and developed. The results of comparative investigations of carbon nanostructures' arrays grown as from gas phase so directly from carbonaceous substrates are presented in the article. Physical model which explains the form of nanostructures grown from carbonaceous substrates is offered. Also the field emission characteristics of mediums based on these nanostructures are studied.

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Ye. Yu. Alekseeva, E. A. Il'ichev, V. N. Inkin, D. M. Migunov, G. N. Petruhin, E. A. Poltoratskii, G. S. Rychkov, and D. V. Shkodin "Carbon nanostructures' catalytic growth from carbonaceous substrates in comparison with PECCVD method", Proc. SPIE 7521, International Conference on Micro- and Nano-Electronics 2009, 75210Z (26 February 2010); https://doi.org/10.1117/12.855453

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