LDGI signal subdivision by soft computing for nanomeasurement

Kuang-Chao Fan; Fang Cheng

doi:10.1117/12.885413

28 December 2010 LDGI signal subdivision by soft computing for nanomeasurement

Kuang-Chao Fan, Fang Cheng

Proceedings Volume 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation; 75440I (2010) https://doi.org/10.1117/12.885413
Event: Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 2010, Hangzhou, China

Abstract

A high-precision optical scale called LDGI (Linear Diffraction Grating Interferometer) has been developed for long stroke measurement to nanometer accuracy. This study presents the principle of newly developed LDGI and its possible waveform errors of output signals. Mathematical methods for waveform error correction, pulse counting, signal subdivision and displacement calculation are proposed. All the digital processes are carried out by software. Experimental results show that the system has high tolerance to geometrical errors of the moving stage. The standard deviation of measured values is within 20nm even up to 18mm long stroke.

Citation Download Citation

Kuang-Chao Fan and Fang Cheng "LDGI signal subdivision by soft computing for nanomeasurement", Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 75440I (28 December 2010); https://doi.org/10.1117/12.885413

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