Edge profile measurement of micro-cutting tools on a diamond turning machine

T. Asai; S. H. Jang; Y. Arai; W. Gao

doi:10.1117/12.885660

28 December 2010 Edge profile measurement of micro-cutting tools on a diamond turning machine

T. Asai, S. H. Jang, Y. Arai, W. Gao

Proceedings Volume 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation; 75440J (2010) https://doi.org/10.1117/12.885660
Event: Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 2010, Hangzhou, China

Abstract

Single crystal diamond micro-cutting tools, which are used for fabrication of precision micro-parts, have very sharp tool edges with radii in the range of tens of nanometers or even nanometers. Although there are many types of tools, the tools with a rounded nose are treated in this paper. They can be used for fabrication of very smooth and accurate surface with 3D micro structures such as micro-lens arrays, diffractive optical elements and so on. The machined quality is highly depending on the tool edges' states and it is desired to manage them. This paper presents a measuring instrument based on atomic force microscope (AFM), which is designed and constructed for on-machine measurement of the cutting edge profile. It is a combination of an AFM probe unit for 3D edge profile measurement and an alignment system with an optical sensor for aligning the probe-tip with the tool's edge top so that the measurement can be carried out in a short time. Measurement experiments of micro-tools with (nominal) nose radii of 8 μm and 0.2 mm are summarized to show the performance of the instrument. And the nose radii were evaluated as 7.2 μm and 0.188 mm, respectively.

Citation Download Citation

T. Asai, S. H. Jang, Y. Arai, and W. Gao "Edge profile measurement of micro-cutting tools on a diamond turning machine", Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 75440J (28 December 2010); https://doi.org/10.1117/12.885660

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