Capacitive lamb wave transducers with multiple even-modes for biochemical detections

Li-Feng Ge; Jin-Ping Shao

doi:10.1117/12.885567

28 December 2010 Capacitive lamb wave transducers with multiple even-modes for biochemical detections

Li-Feng Ge, Jin-Ping Shao

Proceedings Volume 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation; 75442U (2010) https://doi.org/10.1117/12.885567
Event: Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 2010, Hangzhou, China

Abstract

The high-order even-modes of high-aspect-ratio rectangular diaphragms are further exploited in this paper to excite Lamb waves. Thus the capacitive Lamb wave transducer (CLWT) can be excited by not only the second-order mode but also higher order even-modes, so that we can obtain higher operation frequencies, and make the CLWTs operate at several different frequencies for different applications. An optimized design with a 3μm thick silicon plate and submicrometer thick conducting silicon diaphragms is given according to the characteristics of the lowest order Lamb wave (i.e. A₀ wave) and the TDK model for capacitive micromachined ultrasonic transducers (CMUT) with high-aspect-ratio rectangular diaphragms. Such a CLWT with multiple even-modes is significant and attractive for gas and liquid sensing in the field of biochemical measurements.

Citation Download Citation

Li-Feng Ge and Jin-Ping Shao "Capacitive lamb wave transducers with multiple even-modes for biochemical detections", Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 75442U (28 December 2010); https://doi.org/10.1117/12.885567

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