Size and mass loading effect on quality factor of single-crystal silicon cantilever in atmosphere

Yong Liu; Gang Zhao; Yu-hang Chen; Jia-ru Chu

doi:10.1117/12.885304

28 December 2010 Size and mass loading effect on quality factor of single-crystal silicon cantilever in atmosphere

Yong Liu, Gang Zhao, Yu-hang Chen, Jia-ru Chu

Proceedings Volume 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation; 754462 (2010) https://doi.org/10.1117/12.885304
Event: Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 2010, Hangzhou, China

Abstract

For the single silicon cantilevers with low kinetic Reynolds numbers from 0.06 to 0.17, a modification of the existing approximate model for air damping analysis is presented. The mass added at the end is found to improve the quality factor of a cantilever in atmosphere. Silica gel is added at the end of the cantilever, as the loading mass. For a mass-loaded cantilever of 465x10x0.8 μm³, the quality factor is improved from 7.25 to 19.07, according to the loading mass of 21.79 ng. However, the frequency of the cantilever declines from 5.54 kHz to 1.68 kHz, resulting in a worse force detection resolution at the end.

Citation Download Citation

Yong Liu, Gang Zhao, Yu-hang Chen, and Jia-ru Chu "Size and mass loading effect on quality factor of single-crystal silicon cantilever in atmosphere", Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 754462 (28 December 2010); https://doi.org/10.1117/12.885304

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