Growth of intersubband GaN/AlGaN heterostructures

A. Dussaigne; S. Nicolay; D. Martin; A. Castiglia; N. Grandjean; L. Nevou; H. Machhadani; M. Tchernycheva; L. Vivien; F. H. Julien; T. Remmele; M. Albrecht

doi:10.1117/12.847082

22 January 2010 Growth of intersubband GaN/AlGaN heterostructures

A. Dussaigne, S. Nicolay, D. Martin, A. Castiglia, N. Grandjean, L. Nevou, H. Machhadani, M. Tchernycheva, L. Vivien, F. H. Julien, T. Remmele, M. Albrecht

Author Affiliations +

Proceedings Volume 7608, Quantum Sensing and Nanophotonic Devices VII; 76080H (2010) https://doi.org/10.1117/12.847082
Event: SPIE OPTO, 2010, San Francisco, California, United States

Abstract

GaN/AlN multiple quantum wells (MQWs), designed for intersubband (ISB) absorption in the telecommunication range, are grown by molecular beam epitaxy. We demonstrate that the use of both AlN template and optimized growth temperature allows to reach ISB transition energy in the telecom range, i.e. above 0.8 eV (λ = 1.55 μm). Absorption spectra exhibit narrow linewidth (< 50 meV) with a relative energy broadening of 8%. An electro-optical modulator based on electron tunnelling in coupled QWs is then fabricated. A modulation bandwidth of 2 GHz at -3 dB cut off frequency is achieved for 15x15 μm² mesas. We show that the modulation rate is limited by the device geometry rather than by the material quality, which makes this technology a good candidate for THz regime.

Citation Download Citation

A. Dussaigne, S. Nicolay, D. Martin, A. Castiglia, N. Grandjean, L. Nevou, H. Machhadani, M. Tchernycheva, L. Vivien, F. H. Julien, T. Remmele, and M. Albrecht "Growth of intersubband GaN/AlGaN heterostructures", Proc. SPIE 7608, Quantum Sensing and Nanophotonic Devices VII, 76080H (22 January 2010); https://doi.org/10.1117/12.847082

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available