Triple-scale analysis and fabrication of new biocompatible MgSiO3 piezoelectric thin films

Hwisim Hwang; Yasutomo Uetsuji; Tsutao Katayama; Eiji Nakamachi

doi:10.1117/12.847277

30 March 2010 Triple-scale analysis and fabrication of new biocompatible MgSiO₃ piezoelectric thin films

Hwisim Hwang, Yasutomo Uetsuji, Tsutao Katayama, Eiji Nakamachi

Proceedings Volume 7644, Behavior and Mechanics of Multifunctional Materials and Composites 2010; 76440D (2010) https://doi.org/10.1117/12.847277
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2010, San Diego, California, United States

Abstract

Recently, the lead free piezoelectric material, which should be used for medical devices, such as health monitoring system (HMS) and drug delivery system (DDS), is strongly required. In this study, we discovered a newly designed MgSiO₃ thin film, as a biocompatible piezoelectric actuator, by using the first-principles calculation and process crystallography simulation algorithm. At first, crystal structure was calculated by using the first-principles density functional theory. Secondly, the best substrate for MgSiO₃ was searched by using the process crystallography simulation. Next, MgSiO₃ thin film was generated in our laboratory by using the RF magnetron sputtering apparatus. Finally, crystallographic orientation was obtained by using X-ray diffractometer and the piezoelectric property of thin film was measured by the ferroelectric measurement system. As a result, lattice parameters of MgSiO₃ with tetragonal structure were obtained as a=b=0.3449nm and c=0.3538nm, and its aspect ratio was 1.026. Au(111) was chosen as the best substrate, on which MgSiO₃ thin film with minimum total energy could be grown. Then, MgSiO₃(111) was generated on Au(111)/SrTiO₃(110) by using the RF magnetron sputtering apparatus. The piezoelectric strain constant d₃₃ of MgSiO₃ thin film generated at 400°C was measured as 219.8pm/V and it was higher than one of the existing piezoelectric material BaTiO₃. Consequently, we succeeded the generation of a new biocompatible MgSiO₃ piezoelectric thin film, which can be applied to medical devices in the future.

Citation Download Citation

Hwisim Hwang, Yasutomo Uetsuji, Tsutao Katayama, and Eiji Nakamachi "Triple-scale analysis and fabrication of new biocompatible MgSiO₃ piezoelectric thin films", Proc. SPIE 7644, Behavior and Mechanics of Multifunctional Materials and Composites 2010, 76440D (30 March 2010); https://doi.org/10.1117/12.847277

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