Microstructure and texture analysis of advanced copper using electron backscattered diffraction and scanning transmission electron microscopy

R. Galand; L. Clément; P. Waltz; Y. Wouters

doi:10.1117/12.852908

8 June 2010 Microstructure and texture analysis of advanced copper using electron backscattered diffraction and scanning transmission electron microscopy

R. Galand, L. Clément, P. Waltz, Y. Wouters

Author Affiliations +

Proceedings Volume 7729, Scanning Microscopy 2010; 77290B (2010) https://doi.org/10.1117/12.852908
Event: Scanning Microscopy 2010, 2010, Monterey, California, United States

Abstract

In this article, we focus on the characterization of copper interconnect by Electron Backscattered Diffraction (EBSD) in the final aim of reliability issue investigation. In a first time we demonstrate that we achieve to characterize copper lines of 70 nm width after some improvements in sample preparation. Then, after showing that EBSD is well adapted to characterize our structure even for very small dimensions (line width smaller than 100 nm), we propose to associate Transmission Electron Microscope in scanning mode (STEM) to complete information given by EBSD and localize defects due to electromigration. We begin by highlighting the very good correspondence between EBSD map and STEM images on line with small microstructure and finally we apply both techniques on a tested copper line after electromigration. In this case we show the relevance of using STEM to localize the defect due to electromigration which can not be seen on EBSD map.

Citation Download Citation

R. Galand, L. Clément, P. Waltz, and Y. Wouters "Microstructure and texture analysis of advanced copper using electron backscattered diffraction and scanning transmission electron microscopy", Proc. SPIE 7729, Scanning Microscopy 2010, 77290B (8 June 2010); https://doi.org/10.1117/12.852908

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available