Polymer micro-molding of femtosecond laser micromachined substrates

Marco Matteucci; Frédéric Madani-Grasset; Yves Bellouard; Dawn Vitek; Jeff Squier

doi:10.1117/12.886305

11 February 2011 Polymer micro-molding of femtosecond laser micromachined substrates

Marco Matteucci, Frédéric Madani-Grasset, Yves Bellouard, Dawn Vitek, Jeff Squier

Proceedings Volume 7925, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XI; 79250X (2011) https://doi.org/10.1117/12.886305
Event: SPIE LASE, 2011, San Francisco, California, United States

Abstract

Micro-molding can be used for the cost-effective fabrication of elements such as active or passive components in MEMS devices, hydrophobic surfaces, cell-growth scaffolds or optical components such micro-lens arrays and gratings. This method is also particularly interesting for examining high-aspect ratio laser-machined structures fabricated in glass material. Thanks to this technique, surfaces not accessible with common imaging techniques can be observed on their molded negative structure with very high fidelity. As an illustration, we issue the use of the PDMS molding technique to analyze the quality of high aspect ratio holes and channels structures. Furthermore, we show preliminary results on the molding of a novel type of complex structures formed in glass using temporal and spatial beam shaping.

Citation Download Citation

Marco Matteucci, Frédéric Madani-Grasset, Yves Bellouard, Dawn Vitek, and Jeff Squier "Polymer micro-molding of femtosecond laser micromachined substrates", Proc. SPIE 7925, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XI, 79250X (11 February 2011); https://doi.org/10.1117/12.886305

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