Increasing of the EUV resist's sensitivity

M. S. Kitai; A. M. Soroka; I. G. Rudoi

doi:10.1117/12.887243

28 February 2011 Increasing of the EUV resist's sensitivity

M. S. Kitai, A. M. Soroka, I. G. Rudoi

Proceedings Volume 7996, Fundamentals of Laser-Assisted Micro- and Nanotechnologies 2010; 799612 (2011) https://doi.org/10.1117/12.887243
Event: Fundamentals of Laser Assisted Micro- and Nanotechnologies 2010, 2010, St. Petersburg, Russian Federation

Abstract

In this article there are considered two methods of increasing of the sensitivity for polymer resists. These resists are used in the process of extreme UV (EUV) lithography. The both discussed methods can be used independently of one another or in turn. The first method supposes usage specific polymers as EUV resists. The increase of the coefficient of absorption in relation to EUV waves is characteristic for these polymers. The second method is applicable only for particular positive polymer resists. This method assumes an additional irradiation of the substrate's plane by the UV light appropriate to the certain spectral range. These waves are affecting exclusively on the earlier formed polymer macro-radicals. So the number of macromolecular ruptures increases in several times only in the areas preliminary exposed by EUV radiation. Moreover the degradation of the linear resolution due to this procedure is small.

Citation Download Citation

M. S. Kitai, A. M. Soroka, and I. G. Rudoi "Increasing of the EUV resist's sensitivity", Proc. SPIE 7996, Fundamentals of Laser-Assisted Micro- and Nanotechnologies 2010, 799612 (28 February 2011); https://doi.org/10.1117/12.887243

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available