Multiwavelength single-shot interferometry without carrier fringe introduction

Katsuichi Kitagawa

doi:10.1117/12.890302

12 July 2011 Multiwavelength single-shot interferometry without carrier fringe introduction

Katsuichi Kitagawa

Proceedings Volume 8000, Tenth International Conference on Quality Control by Artificial Vision; 800009 (2011) https://doi.org/10.1117/12.890302
Event: 10th International Conference on Quality Control by Artificial Vision, 2011, Saint-Etienne, France

Abstract

As a single-shot interferometric technique, spatial carrier interferometry has been thoroughly investigated, and it has been shown to have some problems, such as low spatial resolution. To overcome the problems, we propose a novel single-shot surface profiling technique that does not require carrier introduction. It is based on a model-fitting algorithm and estimates the model parameters and the heights of plural points simultaneously based on their multi-wavelength intensity data. The validity of the proposed method is demonstrated by computer simulations and actual experiments.

Citation Download Citation

Katsuichi Kitagawa "Multiwavelength single-shot interferometry without carrier fringe introduction", Proc. SPIE 8000, Tenth International Conference on Quality Control by Artificial Vision, 800009 (12 July 2011); https://doi.org/10.1117/12.890302

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