A compact and portable IR analyzer: progress of a MOEMS FT-IR system for mid-IR sensing

Andreas Kenda; Stephan Lüttjohann; Thilo Sandner; Martin Kraft; Andreas Tortschanoff; Arno Simon

doi:10.1117/12.883841

12 May 2011 A compact and portable IR analyzer: progress of a MOEMS FT-IR system for mid-IR sensing

Andreas Kenda, Stephan Lüttjohann, Thilo Sandner, Martin Kraft, Andreas Tortschanoff, Arno Simon

Proceedings Volume 8032, Next-Generation Spectroscopic Technologies IV; 80320O (2011) https://doi.org/10.1117/12.883841
Event: SPIE Defense, Security, and Sensing, 2011, Orlando, Florida, United States

Abstract

We show results on the progress in the development of MOEMS based FT spectrometers dedicated to operate in the mid-IR. Recent research is performed within an EC-FP7 project with the goal to show the feasibility of miniaturized high performance infrared spectroscopic chemical analyzers. Exploiting the high analyte selectivity of the mid-IR paired with the inherent sensitivity of an FT-IR spectrometer, such devices could be used in a wide range of applications, from air monitoring over in-line real-time process control to security monitoring. For practical applicability in these fields, appropriate detection limits and spectral quality standards have to be met. The presented system aims at a performance to measure in the range between 4000-700 cm^-1 at a spectral resolution better than 10 cm^-1, which would clearly outmatch previous MOEMS based spectrometer approaches. A further technological advantage is the rapid-scan capability. The MOEMS devices oscillate at 500 Hz. A spectrometer based on this device can acquire 1,000 scans per second in forward-backward mode. The interplay of all these components with the challenges in system integration will be described in detail and experimental results will be shown, presenting a significant step forward in smart spectroscopic sensors, microsystems technology and vibrational spectroscopy instrumentation.

Citation Download Citation

Andreas Kenda, Stephan Lüttjohann, Thilo Sandner, Martin Kraft, Andreas Tortschanoff, and Arno Simon "A compact and portable IR analyzer: progress of a MOEMS FT-IR system for mid-IR sensing", Proc. SPIE 8032, Next-Generation Spectroscopic Technologies IV, 80320O (12 May 2011); https://doi.org/10.1117/12.883841

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