Optimal correction and feedforward control of low-order aberrations with piezoelectric and membrane deformable mirrors

Gleb Vdovin; Oleg Soloviev; Mikhail Loktev; Slava Savenko; Lukasz Dziechciarczyk

doi:10.1117/12.893496

13 September 2011 Optimal correction and feedforward control of low-order aberrations with piezoelectric and membrane deformable mirrors

Gleb Vdovin, Oleg Soloviev, Mikhail Loktev, Slava Savenko, Lukasz Dziechciarczyk

Author Affiliations +

Proceedings Volume 8165, Unconventional Imaging, Wavefront Sensing, and Adaptive Coded Aperture Imaging and Non-Imaging Sensor Systems; 81650W (2011) https://doi.org/10.1117/12.893496
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States

Abstract

By analysis of the mechanical equations, describing deformable mirrors, we show that the print-through is the natural property of a deformable mirror, which is completely defined by the geometry and mechanics of deformation. The print-through causes increased scattering in imaging applications, and can result in hot/cold spots in laser applications. Further development of adaptive optics for extreme UV applications would also require to address the print-through problem. We describe different ways to reduce, or completely eliminate the print-through in continuous faceplate and membrane deformable mirrors. In combination with simple hysteresis compensation, our approach allows for high-precision feedforward control of these deformable mirrors, directly in terms of Zernike modes.

Citation Download Citation

Gleb Vdovin, Oleg Soloviev, Mikhail Loktev, Slava Savenko, and Lukasz Dziechciarczyk "Optimal correction and feedforward control of low-order aberrations with piezoelectric and membrane deformable mirrors", Proc. SPIE 8165, Unconventional Imaging, Wavefront Sensing, and Adaptive Coded Aperture Imaging and Non-Imaging Sensor Systems, 81650W (13 September 2011); https://doi.org/10.1117/12.893496

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