Ultra-precision turning of complex spiral optical delay line

Xiaodong Zhang; Po Li; Fengzhou Fang; Qichang Wang

doi:10.1117/12.911858

28 November 2011 Ultra-precision turning of complex spiral optical delay line

Xiaodong Zhang, Po Li, Fengzhou Fang, Qichang Wang

Proceedings Volume 8202, 2011 International Conference on Optical Instruments and Technology: Solid State Lighting and Display Technologies, Holography, Speckle Pattern Interferometry, and Micro/Nano Manufacturing and Metrology; 82020N (2011) https://doi.org/10.1117/12.911858
Event: International Conference on Optical Instruments and Technology (OIT2011), 2011, Beijing, Beijing, China

Abstract

Optical delay line (ODL) implements the vertical or depth scanning of optical coherence tomography, which is the most important factor affecting the scanning resolution and speed. The spinning spiral mirror is found as an excellent optical delay device because of the high-speed and high-repetition-rate. However, it is one difficult task to machine the mirror due to the special shape and precision requirement. In this paper, the spiral mirror with titled parabolic generatrix is proposed, and the ultra-precision turning method is studied for its machining using the spiral mathematic model. Another type of ODL with the segmental shape is also introduced and machined to make rotation balance for the mass equalization when scanning. The efficiency improvement is considered in details, including the rough cutting with the 5- axis milling machine, the machining coordinates unification, and the selection of layer direction in turning. The onmachine measuring method based on stylus gauge is designed to analyze the shape deviation. The air bearing is used as the measuring staff and the laser interferometer sensor as the position sensor, whose repeatability accuracy is proved up to 10nm and the stable feature keeps well. With this method developed, the complex mirror with nanometric finish of 10.7nm in Ra and the form error within 1um are achieved.

Citation Download Citation

Xiaodong Zhang, Po Li, Fengzhou Fang, and Qichang Wang "Ultra-precision turning of complex spiral optical delay line", Proc. SPIE 8202, 2011 International Conference on Optical Instruments and Technology: Solid State Lighting and Display Technologies, Holography, Speckle Pattern Interferometry, and Micro/Nano Manufacturing and Metrology, 82020N (28 November 2011); https://doi.org/10.1117/12.911858

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