Error compensation for the linear error of a universal tool microscope’s scale system

Xiaofei Wang; Zurong Qiu; Jiaxing Guo; Bopei Yang

doi:10.1117/12.903708

15 November 2011 Error compensation for the linear error of a universal tool microscope’s scale system

Xiaofei Wang, Zurong Qiu, Jiaxing Guo, Bopei Yang

Proceedings Volume 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation; 83210D (2011) https://doi.org/10.1117/12.903708
Event: Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 2011, Yunnan, China

Abstract

The method of 1x asymmetry optical paths generating magnification error is employed in scale system linear error compensation of universal tool microscope’s longitudinal coordinate.The micro-displacements of scale iamges are achieved for compensation of scale linear error based on the property of off-axis and out of focus and focal length inequality. The creative and ingenious optical paths design is discribed in the paper . A detailed analysis of the principle of error compensation is presented. Magnification error principle formula and defocus amount and off-axis aberration error extension formula are also derived. The relationship between the calibration result and slope of formula is obtained to benefit the analysis and application on-site.The influence caused by the change of magnification parameters also are discussed in the paper. Indication error of one-meter longitudinal coordinate can be achieved less than 2.5 um after compensation in using this method.

Citation Download Citation

Xiaofei Wang, Zurong Qiu, Jiaxing Guo, and Bopei Yang "Error compensation for the linear error of a universal tool microscope’s scale system", Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 83210D (15 November 2011); https://doi.org/10.1117/12.903708

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available