Paper
27 March 2012 On the optimization of piezoresistive plate-based sensors with distribution of piezoresistive material
Author Affiliations +
Abstract
Piezoresistive sensors, which have been widely studied and applied to several applications, are usually made of a piezoresistive membrane attached to a flexible substrate, a plate. A topology optimization formulation for the design of piezoresistive plate-based sensors, for which the piezoresistive membrane disposition is optimized together with the substrate, is proposed in this work. The objective is to maximize the sensor sensitivity to external loading, as well as the stiffness of the sensor to particular loads. A material model for the piezoresistive membrane based on the Solid IsotropicMaterial with Penalizationmodel, and perfect coupling conditions between the plate and the membrane based on the "layerwise" theory for laminated plates are employed. Results for an AFM probe suggest that the performance of the sensors can be improved by using the proposed approach.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Luis A. M. Mello and Emílio C. N. Silva "On the optimization of piezoresistive plate-based sensors with distribution of piezoresistive material", Proc. SPIE 8341, Active and Passive Smart Structures and Integrated Systems 2012, 83411G (27 March 2012); https://doi.org/10.1117/12.914989
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Sensors

Chemical elements

Piezoresistive sensors

Aluminum

Optimization (mathematics)

Finite element methods

Matrices

Back to Top