Paper
3 May 2012 Millimeter-scale MEMS enabled autonomous systems: system feasibility and mobility
Jeffrey S. Pulskamp
Author Affiliations +
Abstract
Millimeter-scale robotic systems based on highly integrated microelectronics and micro-electromechanical systems (MEMS) could offer unique benefits and attributes for small-scale autonomous systems. This extreme scale for robotics will naturally constrain the realizable system capabilities significantly. This paper assesses the feasibility of developing such systems by defining the fundamental design trade spaces between component design variables and system level performance parameters. This permits the development of mobility enabling component technologies within a system relevant context. Feasible ranges of system mass, required aerodynamic power, available battery power, load supported power, flight endurance, and required leg load bearing capability are presented for millimeter-scale platforms. The analysis illustrates the feasibility of developing both flight capable and ground mobile millimeter-scale autonomous systems while highlighting the significant challenges that must be overcome to realize their potential.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jeffrey S. Pulskamp "Millimeter-scale MEMS enabled autonomous systems: system feasibility and mobility", Proc. SPIE 8373, Micro- and Nanotechnology Sensors, Systems, and Applications IV, 83731G (3 May 2012); https://doi.org/10.1117/12.918670
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CITATIONS
Cited by 3 scholarly publications.
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KEYWORDS
Microelectromechanical systems

Robots

Robotics

Thin films

Magnesium

Robotic systems

Microelectronics

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