A self-calibrating temperature independent model of a bi-axial piezoelectric MEMS tilt sensor

Paul M. Moubarak; Danielle A. Barsky; Pinhas Ben-Tzvi; Mona Zaghloul

doi:10.1117/12.918419

7 May 2012 A self-calibrating temperature independent model of a bi-axial piezoelectric MEMS tilt sensor

Paul M. Moubarak, Danielle A. Barsky, Pinhas Ben-Tzvi, Mona Zaghloul

Proceedings Volume 8373, Micro- and Nanotechnology Sensors, Systems, and Applications IV; 83732L (2012) https://doi.org/10.1117/12.918419
Event: SPIE Defense, Security, and Sensing, 2012, Baltimore, Maryland, United States

Abstract

The dual-axis piezoelectric tilt measurement device presented in this paper is modeled using a proposed methodology that generates a self-calibrating representation of the sensor's output around two axes. Typically, when a piezo-based sensor is developed, its output is modeled as a direct function of its geometric, electro-mechanical and piezoelectric properties. This means that an accurate representation of the sensor's output requires an accurate knowledge of its characteristics. In piezoelectric MEMS applications however, such information is either not available, or is provided in the form of approximate values which are susceptible to external stimuli. The method proposed in this paper models the direct piezoelectric effect as a function of genetic data provided a priori about the operation of a piezo-system. The resulting model is shown to be independent of any system-specific characteristics or any external stimuli. The impact that these parameters exhibit on the output of the sensor is carried implicitly by the genetic data which is generated through calibration. The validity of the proposed model is demonstrated through simulations performed on a new piezoelectric device for dual-axis tilt measurement. These results show a considerable accuracy under variations in the operating conditions, such as temperature.

Citation Download Citation

Paul M. Moubarak, Danielle A. Barsky, Pinhas Ben-Tzvi, and Mona Zaghloul "A self-calibrating temperature independent model of a bi-axial piezoelectric MEMS tilt sensor", Proc. SPIE 8373, Micro- and Nanotechnology Sensors, Systems, and Applications IV, 83732L (7 May 2012); https://doi.org/10.1117/12.918419

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KEYWORDS

Sensors

Data modeling

Calibration

Ferroelectric materials

Genetics

Mathematical modeling

Microelectromechanical systems

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