R3 measurement by white light interferometry

Mihaela Bojan; D. Apostol; N. Cernescu; Iuliana Iordache; V. Damian; Paul Schiopu

doi:10.1117/12.974491

1 November 2012 R³ measurement by white light interferometry

Mihaela Bojan, D. Apostol, N. Cernescu, Iuliana Iordache, V. Damian, Paul Schiopu

Proceedings Volume 8411, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies VI; 841106 (2012) https://doi.org/10.1117/12.974491
Event: Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies 2012, 2012, Constanta, Romania

Abstract

Radius, roundness and roughness, the three R are the necessary parameters to characterize ball bearings. Roundness is one of the most important geometric forms expected from circular features. Most traditional R³ measuring instruments are stylus type, including the coordinate measuring machines (CMMs). The accuracy requirements for roundness measurements range from a few 0.1 μm for work pieces down to below 10 nm for roundness standards such as precision spheres. White light interferometer is a suitable noncontact method for height profile measurement of objects able to furnish such values. White light interferometer (WLI) produced by Ambios Xi-100 was used to measure radius, roundness and roughness of steel ball bearings. Radius is calculated from the Newton rings easily observed in the interferometer, roundness is observed by limiting the height surface profile between two inner and exterior circles and roughness is RMS value for the best fit line to the ball profile. All the values can be easily obtained from the .txt files produced by the instrument software.

Citation Download Citation

Mihaela Bojan, D. Apostol, N. Cernescu, Iuliana Iordache, V. Damian, and Paul Schiopu "R³ measurement by white light interferometry", Proc. SPIE 8411, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies VI, 841106 (1 November 2012); https://doi.org/10.1117/12.974491

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