Calibration of misalignment aberrations in cylindrical surface interferometric measurement

Junzheng Peng; Dongbao Ge; Yingjie Yu; Mingyi Chen

doi:10.1117/12.2018919

13 May 2013 Calibration of misalignment aberrations in cylindrical surface interferometric measurement

Junzheng Peng, Dongbao Ge, Yingjie Yu, Mingyi Chen

Proceedings Volume 8788, Optical Measurement Systems for Industrial Inspection VIII; 878829 (2013) https://doi.org/10.1117/12.2018919
Event: SPIE Optical Metrology 2013, 2013, Munich, Germany

Abstract

This paper presents a misalignment aberrations calibration method for the interferometric testing of cylindrical surface. This approach is based on a simple polynomials function, which is deduced by analyzing the geometry of the misalignment aberrations and perfectly describes the relationship between the misalignment aberrations and the corresponding adjustment errors. A least-squares algorithm for calibration of the misalignment aberrations was implemented towards the measured phase data, and the adjustment errors can be estimated through the proposed mathematical model. Then by subtracting the fitting function from the measured phase data, the misalignment aberrations and the genuine deviation of the test cylindrical surface can be completely separated. By means of simulation and experimental results, the repeatability and accuracy of the technique are discussed.

Citation Download Citation

Junzheng Peng, Dongbao Ge, Yingjie Yu, and Mingyi Chen "Calibration of misalignment aberrations in cylindrical surface interferometric measurement", Proc. SPIE 8788, Optical Measurement Systems for Industrial Inspection VIII, 878829 (13 May 2013); https://doi.org/10.1117/12.2018919

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