Characterization of Diamond-like Carbon (DLC) films deposited by RF ICP PECVD method

Waldemar Oleszkiewicz; Wojciech Kijaszek; Jacek Gryglewicz; Adrian Zakrzewski; Krzysztof Gajewski; Daniel Kopiec; Paulina Kamyczek; Ewa Popko; Marek Tłaczała

doi:10.1117/12.2031066

25 July 2013 Characterization of Diamond-like Carbon (DLC) films deposited by RF ICP PECVD method

Waldemar Oleszkiewicz, Wojciech Kijaszek, Jacek Gryglewicz, Adrian Zakrzewski, Krzysztof Gajewski, Daniel Kopiec, Paulina Kamyczek, Ewa Popko, Marek Tłaczała

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Proceedings Volume 8902, Electron Technology Conference 2013; 89022H (2013) https://doi.org/10.1117/12.2031066
Event: Electron Technology Conference 2013, 2013, Ryn, Poland

Abstract

The work presents the results of a research carried out with Plasmalab Plus 100 system, manufactured by Oxford Instruments Company. The system was configured for deposition of diamond-like carbon films by ICP PECVD method. The deposition processes were carried out in CH₄ or CH₄/H₂ atmosphere and the state of the plasma was investigated by the OES method. The RF plasma was capacitively coupled by 13.56 MHz generator with supporting ICP generator (13.56 Mhz). The deposition processes were conducted in constant value of RF generator’s power and resultant value of the DC Bias. The power values of RF generator was set at 70 W and the power values of ICP generator was set at 300 W. In this work we focus on the influence of DLC film’s thickness on optical, electrical and structural properties of the deposited DLC films. The quality of deposited DLC layers was examined by the Raman spectroscopy, AFM microscopy and spectroscopic ellipsometry. In the investigated DLC films the calculated sp³ content was ranging from 60 % to 70 %. The films were characterized by the refractive index ranging from 2.03 to 2.1 and extinction coefficient ranging from 0.09 to 0.12.

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Waldemar Oleszkiewicz, Wojciech Kijaszek, Jacek Gryglewicz, Adrian Zakrzewski, Krzysztof Gajewski, Daniel Kopiec, Paulina Kamyczek, Ewa Popko, and Marek Tłaczała "Characterization of Diamond-like Carbon (DLC) films deposited by RF ICP PECVD method ", Proc. SPIE 8902, Electron Technology Conference 2013, 89022H (25 July 2013); https://doi.org/10.1117/12.2031066

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