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Micro fluid-jet polishing technology is a new kind of ultra-smooth machining method which proposed on the basis of
float polishing principle and combined with small tool polishing. This article will use micro jet ultra-smooth machine
which developed by ourselves to develop the process experiment for plane elements. In the experiment, the material
removal rate and surface roughness are taken as the assessment index, and the orthogonal experiment method is used to
study the processing effect of different process parameters, such as the spindle speed, the pressure of the grinding head
and the abrasive concentration. On the basis of the experimental results and combined with the micro jet polishing
mechanism, the processing effect law of the various process parameters is analyzed. It shows that, the influence of
polishing pressure and abrasive concentration on the removal efficiency is single, that is to say, the removal efficiency
can be increased either by increasing the polishing pressure or by increasing the concentration of the slurry. However,
the influence of the grinding speed on removal efficiency is not simple, the removal efficiency can be increased by
increasing the grinding speed in the certain range, if continue to increase, the removal efficiency will decrease. The
influence of the process parameters on the roughness is more complex, but it can be summarized grossly as follows: if
the roughness is required to reduce quickly, the large polishing pressure and high concentration slurry can be chosen,
but it has a large depth of removal; if the roughness is required to reduce and the removal depth is as small as possible,
the little polishing pressure and the dilute polishing liquid can be chosen, but it has a long polishing time. So in the
actual processing, the process parameters should be adjusted according to different machining needs, to finally reach the
optimization.
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