Investigation of temperature characteristic of MEMS-based optical fiber pressure sensor

Jinde Yin; Tiegen Liu; Junfeng Jiang; Kun Liu; Shuang Wang; Bofu Zhao; Lei Xue; Yunqiao Mei; Yi Pu; Jishou Yin; Zunqi Qin; Shengliang Zou

doi:10.1117/12.2036262

20 December 2013 Investigation of temperature characteristic of MEMS-based optical fiber pressure sensor

Jinde Yin, Tiegen Liu, Junfeng Jiang, Kun Liu, Shuang Wang, Bofu Zhao, Lei Xue, Yunqiao Mei, Yi Pu, Jishou Yin, Zunqi Qin, Shengliang Zou

Author Affiliations +

Proceedings Volume 9044, 2013 International Conference on Optical Instruments and Technology: Optical Sensors and Applications; 90440B (2013) https://doi.org/10.1117/12.2036262
Event: International Conference on Optical Instruments and Technology (OIT2013), 2013, Beijing, China

Abstract

We fabricated MEMS-based optical fiber pressure sensor with anodic bonding. The vacuum-sealed microcavity with a thin silicon diaphragm is used as sensing element and its deformation characteristics determine the pressure measurement performance. Considering residual gas inside Fabry-Perot cavity and the thermal properties of material, we established a sensor’s temperature response mathematical model based on ideal gas equation and elastic theory. Temperature experiment of this sensor was carried out under vacuum. This work will provide a guide of temperature compensation process for achieving high precision pressure measurement.

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Jinde Yin, Tiegen Liu, Junfeng Jiang, Kun Liu, Shuang Wang, Bofu Zhao, Lei Xue, Yunqiao Mei, Yi Pu, Jishou Yin, Zunqi Qin, and Shengliang Zou "Investigation of temperature characteristic of MEMS-based optical fiber pressure sensor", Proc. SPIE 9044, 2013 International Conference on Optical Instruments and Technology: Optical Sensors and Applications, 90440B (20 December 2013); https://doi.org/10.1117/12.2036262

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