CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume PC12240 > Article
Presentation
3 October 2022 Fabrication for a 400 mm long glue-free deformable mirror (Conference Presentation)
Yoshio Ichii, Hiromi Okada, Shinsaku Shiroma, Shinya Aono, Masahiko Kanaoka, Takato Inoue, Satoshi Matsuyama, Kazuto Yamauchi
Author Affiliations +
Proceedings Volume PC12240, Advances in X-Ray/EUV Optics and Components XVII; PC122400A (2022) https://doi.org/10.1117/12.2633296
Event: SPIE Optical Engineering + Applications, 2022, San Diego, California, United States
Abstract
PZT (lead zirconate titanate)-glued bimorph deformable mirrors are widely used in hard X-ray regimes, however, they have not yet been used in soft X-ray regimes because they are less compatible for usage under high vacuum. Therefore, we have developed a glue-free bimorph deformable mirror, in which silver nanoparticles were employed to bond PZT actuators to mirror substrates. In this study, we manufactured a 400 mm long deformable mirror which has 30 channels on plane mirror surfaces. We evaluated the PZT response by applying voltage to each electrode.
Conference Presentation
© (2022) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Yoshio Ichii, Hiromi Okada, Shinsaku Shiroma, Shinya Aono, Masahiko Kanaoka, Takato Inoue, Satoshi Matsuyama, and Kazuto Yamauchi "Fabrication for a 400 mm long glue-free deformable mirror (Conference Presentation)", Proc. SPIE PC12240, Advances in X-Ray/EUV Optics and Components XVII, PC122400A (3 October 2022); https://doi.org/10.1117/12.2633296
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 PRESENTATION
WATCH
PRESENTATION SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
KEYWORDS
Deformable mirrors
Ferroelectric materials
Mirrors
Hard x-rays
Lead
Manufacturing
Nanoparticles
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top