Hierarchical patterning: sub-10 µm 3D structures nano-textured by block copolymer self-assembly

Raphaël Feougier; Maxime Argoud; Nicolas Posseme; Raluca Tiron

doi:10.1117/12.2654150

30 April 2023 Hierarchical patterning: sub-10 µm 3D structures nano-textured by block copolymer self-assembly

Raphaël Feougier, Maxime Argoud, Nicolas Posseme, Raluca Tiron

Proceedings Volume PC12497, Novel Patterning Technologies 2023; PC124970N (2023) https://doi.org/10.1117/12.2654150
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States

Conference Poster

Abstract

Hierarchical structures that combine microlens arays and nanostructures are broadly studied to reproduce the physicochemical properties found in the moth-eyes. Multiscale structures offer multifunctional properties of great significance in optoelectronic devices. The first approaches reported in the literature to achieve these hierarchical structures were to use the compound eye of a moth as a biological mold. Several researchers have successfully produced hierarchical microlens structures with conventional lithography or etching techniques. However, these studies limit the achievement of these structures to a poor variety of dimensions or shapes. Here we present a new method to achieve hierarchical patterning of sub-10 µm 3D structure (lens or bowl) with nanostructure patterns of lines or contacts.

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Raphaël Feougier, Maxime Argoud, Nicolas Posseme, and Raluca Tiron "Hierarchical patterning: sub-10 µm 3D structures nano-textured by block copolymer self-assembly", Proc. SPIE PC12497, Novel Patterning Technologies 2023, PC124970N (30 April 2023); https://doi.org/10.1117/12.2654150

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