Freeform processing from precision grinding up to ion-beam-figuring

Sebastian Stoebenau; Rafael Hild

doi:10.1117/12.2691060

30 November 2023 Freeform processing from precision grinding up to ion-beam-figuring

Sebastian Stoebenau, Rafael Hild

Proceedings Volume PC12778, Optifab 2023; PC1277802 (2023) https://doi.org/10.1117/12.2691060
Event: SPIE Optifab, 2023, Rochester, New York, United States

Abstract

The production of medium to large lenses (200 - 500 mm) is becoming increasingly important against the background of the semiconductor crisis. The value of a lens increases enormously through the entire value chain. The grinding, polishing and correction processes must be precisely coordinated in order to achieve highest levels of shape accuracy and surface finish. This leads to increasing demands with respect to the manufacturing equipment and processes. Not only a single step but the whole process chain needs to be addressed during optimization. It starts with the reduction of MSF errors during grinding and ends with well converging correction cycles during polishing. The very consequent design of ultra-precision grinding machines comprises hydrostatic bearings and a gantry-type machine base made from granite. The efficient pre-polishing of aspheres and freeforms demands for tools with high removal rates even at relatively small polishing spot sizes. The reliability and convergence of the correction cycles during polishing strongly depends on stable and predictable removal functions. For each step we identify the key challenges and introduce ways to meet them.

Conference Presentation

Citation Download Citation

Sebastian Stoebenau and Rafael Hild "Freeform processing from precision grinding up to ion-beam-figuring", Proc. SPIE PC12778, Optifab 2023, PC1277802 (30 November 2023); https://doi.org/10.1117/12.2691060

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