We propose a monolithic integrated cavity optomechanical accelerometer based on push-pull photonic crystal zipper cavity. The accelerometer integrates grating couplers, phase modulators, acceleration sensing unit, and electrostatic force feedback module on a chip. We use push-pull structure to eliminate the coupling crosstalk caused by paraxial acceleration and extend its range using electrostatic force feedback module. The transmissive photonic crystal zipper cavity structure is adopted to improve the integration and stability of the system. Accurate results are demonstrated as follows: the bandwidth is larger than 20 kHz, the mechanical sensitivity is 369 pm/g, the measuring range is ±100 g, and the noise equivalent acceleration is 5.06 μg / Hz. With its advantages, the accelerometer can be used in consumer electronics, aerospace, resource exploration, and other fields. |
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CITATIONS
Cited by 1 scholarly publication.
Accelerometers
Photonic crystals
Waveguides
Lithium niobate
Optical engineering
Optical transmission
Design and modelling