A highly sensitive flow rate sensor based on high-order whispering gallery mode (WGM) in an optofluidic microcavity is proposed and experimentally demonstrated. The microfluidic flow rate can be measured by detecting the shift of the resonance wavelength of the high-order WGM, which is generated by coupling the ultrafine fiber cone with the microfluidic microcavity. The detectable flow rate range is 4 to |
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Microfluidics
Optical microcavities
Whispering gallery modes
Sensors
Optofluidics
Temperature metrology
Capillaries