8 February 2024 Flow rate sensor based on high-order whispering gallery mode in optofluidic microcavity
Xiang Zhang, Xuan Feng, Chao Zhu, Maohui He, Xuehua Zhao, Jin Xu, Liu Cao
Author Affiliations +
Abstract

A highly sensitive flow rate sensor based on high-order whispering gallery mode (WGM) in an optofluidic microcavity is proposed and experimentally demonstrated. The microfluidic flow rate can be measured by detecting the shift of the resonance wavelength of the high-order WGM, which is generated by coupling the ultrafine fiber cone with the microfluidic microcavity. The detectable flow rate range is 4 to 100 μL/min and is segmented into two parts according to the sign of the resonance wavelength shift. The resonance wavelength for the flow rate of 4 to 16 μL/min is blue-shifted with a sensitivity of 48.8 pm/(μL/min), and the resonance wavelength for the flow rate of 16 to 100 μL/min is red-shifted with a sensitivity of 26.3 pm/(μL/min) with the heating temperature set to 55°C.

© 2024 Society of Photo-Optical Instrumentation Engineers (SPIE)
Xiang Zhang, Xuan Feng, Chao Zhu, Maohui He, Xuehua Zhao, Jin Xu, and Liu Cao "Flow rate sensor based on high-order whispering gallery mode in optofluidic microcavity," Optical Engineering 63(2), 026101 (8 February 2024). https://doi.org/10.1117/1.OE.63.2.026101
Received: 2 November 2023; Accepted: 20 January 2024; Published: 8 February 2024
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KEYWORDS
Microfluidics

Optical microcavities

Whispering gallery modes

Sensors

Optofluidics

Temperature metrology

Capillaries

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