Mr. Jörg Albers Profile

Jörg Albers

at Fraunhofer-ISIT

SPIE Involvement:

Author

Publications (7)

Proceedings Article | 15 March 2023 Presentation + Paper

Efficient piezoelectric gimbal-less MEMS-mirror with large design flexibility

L. Wysocki, L. Ratzmann, P. Schütt, J. Albers, G. Wille, S. Gu-Stoppel

Proceedings Volume 12434, 124340H (2023) https://doi.org/10.1117/12.2647807

KEYWORDS: Design and modelling, Projection systems, Mirrors, Augmented reality, Windows, Actuators, Semiconducting wafers, Optical scanning, Silicon

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Biaxial resonant MEMS-scanners are considered as promising core-device in state-of-the-art imaging and projection systems due to their compactness, the large field-of-view, high speed, and comparably low power consumption. However, the usage in three-dimensional LIDAR modules or projectors for industrial applications is often limited by non-optimal Lissajous-scanning patterns. To achieve dense and spatially uniform Lissajous-trajectories, a suitable frequency ratio of the two oscillation modes is essential. In previous works, the frequency ratio was either maximized or minimized, which often led either to mechanical fragility or undesirable coupling of the two normal modes. For solving the abovementioned problems, a piezoelectrically-driven biaxial MEMS-scanner exhibiting large design flexibility, enabling the individual tailoring of the two orthogonal rotational oscillation-modes and Lissajous-patterns with large fill factor, was developed. This design freedom and decoupling of two axes motions are achieved by a gimbal-less design with individual actuator systems for the two oscillatory axes. Driven by the CMOS-compatible piezoelectric Al(Sc)N, the Q-factor of the resonant mirror with large optical aperture of 5 mm is enhanced by hermetic wafer-level glass-encapsulation. A projection module, which combines the biaxial MEMS-scanner, an RGB-laser-beam combiner, and the electronics for both read-out and control, was developed in the frame of a funded research project (”MEMS-scanner-based laser projection system for maritime augmented reality”). The target of the project was the development of a smart window, in the sense of a MEMS-scanner-based laser projection system for maritime augmented reality, which offers the possibility to fade in safety-relevant information of navigation and ship sensors into the field-of-view of the bridge personnel on the ship’s bridge. Such projector is promising also for further applications in industry, for instance in 3D cameras.

Proceedings Article | 2 March 2022 Presentation + Paper

Rapid control prototyping for Al(Sc)N based highly linear quasi-static MEMS mirrors with large optical apertures

N. Laske, S. Gu-Stoppel, J. Albers, L. Wen

Proceedings Volume 12013, 1201307 (2022) https://doi.org/10.1117/12.2609574

KEYWORDS: Mirrors, Finite impulse response filters, Microelectromechanical systems, Simulink, Filtering (signal processing), Actuators, Control systems, Micromirrors, MATLAB, Piezoelectric thin film actuators, Control systems design

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Proceedings Article | 28 March 2021 Presentation + Paper

Laser beam scanning based AR-display applying resonant 2D MEMS mirrors

Oleg Petrak, Fabian Schwarz, Leon Pohl, Marcel Reher, Christian Janicke, Jan Przytarski, Frank Senger, Jörg Albers, Thorsten Giese, Lars Ratzmann, Peter Blicharski, Stephan Marauska, Thomas von Wantoch, Ulrich Hofmann

Proceedings Volume 11765, 1176503 (2021) https://doi.org/10.1117/12.2579695

KEYWORDS: Microelectromechanical systems, Mirrors, RGB color model, Projection systems, Laser sources, Control systems, Waveguides, Virtual reality, Video, Prototyping

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Proceedings Article | 5 March 2021 Presentation + Paper

A design and manufacturing platform for AlScN based highly linear quasi-static MEMS mirrors with large optical apertures

S. Gu-Stoppel, F. Senger, L. Wen, E. Yarar, G. Wille, J. Albers

Proceedings Volume 11697, 116970F (2021) https://doi.org/10.1117/12.2583399

KEYWORDS: Optics manufacturing, Mirrors, Microelectromechanical systems, Design for manufacturability, Glasses, Actuators, Semiconducting wafers, Particles, Humidity

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Proceedings Article | 5 March 2021 Presentation + Paper

A 2D circular-scanning piezoelectric MEMS mirror for laser material processing

F. Senger, S. Gu-Stoppel, L. Wen, J. Albers, M. Timmermann, Stefan Bruns, G. Piechotta, U. Bünting, M. Schulz-Ruhtenberg

Proceedings Volume 11697, 1169704 (2021) https://doi.org/10.1117/12.2584075

KEYWORDS: Microelectromechanical systems, Mirrors, Scanners, Polygon scanners, Laser processing, Beam steering, Superposition, Signal processing, Reflectivity, Position sensors

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Proceedings Article | 28 February 2020 Paper

Resonant 1D MEMS mirror with a total optical scan angle of 180° for automotive LiDAR

Fabian Schwarz, Frank Senger, Jörg Albers, Pauline Malaurie, Christian Janicke, Leon Pohl, Felix Heinrich, Dirk Kaden, Hans-Joachim Quenzer, Fabian Lofink, Andreas Bahr, Thomas von Wantoch, Ulrich Hofmann

Proceedings Volume 11293, 1129309 (2020) https://doi.org/10.1117/12.2546035

KEYWORDS: Mirrors, Microelectromechanical systems, Scanners, LIDAR, Semiconducting wafers, Sensors, Glasses, Laser scanners, Humidity, 3D scanning

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Proceedings Article | 28 February 2020 Presentation + Paper

A bi-axial vacuum-packaged piezoelectric MEMS mirror for smart headlights

F. Senger, J. Albers, U. Hofmann, G. Piechotta, T. Giese, F. Heinrich, T. von Wantoch, S. Gu-Stoppel

Proceedings Volume 11293, 1129305 (2020) https://doi.org/10.1117/12.2542802

KEYWORDS: Microelectromechanical systems, Mirrors, Semiconducting wafers, Wafer bonding, Actuators, Aluminum nitride, Headlamps, Glasses, Silicon, Molybdenum

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Showing 5 of 7 publications

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