Dr. Philipp Hüthwohl
at Carl Zeiss SMT GmbH
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | 1 March 2023
Jens Timo Neumann, Abhilash Srikantha, Philipp Hüthwohl, Keumsil Lee, James William B., Thomas Korb, Eugen Foca, Tomasz Garbowski, Daniel Boecker, Sayantan Das, Sandip Halder
JM3, Vol. 22, Issue 02, 021009, (March 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.2.021009
KEYWORDS: Defect detection, Education and training, Back end of line, Image restoration, Image classification, Data modeling, Scanning electron microscopy, Process modeling, Machine learning, Electron microscopes

Proceedings Article | 26 May 2022 Presentation + Paper
Jens Timo Neumann, Abhilash Srikantha, Philipp Hüthwohl, Keumsil Lee, James William B., Thomas Korb, Eugen Foca, Tomasz Garbowski, Daniel Boecker, Sayantan Das, Sandip Halder
Proceedings Volume 12053, 120530I (2022) https://doi.org/10.1117/12.2619766
KEYWORDS: Defect detection, Image classification, Data modeling, Bridges, Back end of line, Visualization, Sensors, Inspection, Semiconductors

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