PROCEEDINGS VOLUME 7204
SPIE MOEMS-MEMS: MICRO- AND NANOFABRICATION | 24-29 JANUARY 2009
Micromachining and Microfabrication Process Technology XIV
Editor Affiliations +
IN THIS VOLUME

5 Sessions, 14 Papers, 0 Presentations, 0 Posters
Devices  (6)
Proceedings Volume 7204 is from: Logo
SPIE MOEMS-MEMS: MICRO- AND NANOFABRICATION
24-29 January 2009
San Jose, California, United States
Front Matter: Volume 7204
Proceedings Volume Micromachining and Microfabrication Process Technology XIV, 720401 (2009) https://doi.org/10.1117/12.828729
Devices
Emily Carr, Ping Zhang, Doug Keebaugh, Kelvin Chau
Proceedings Volume Micromachining and Microfabrication Process Technology XIV, 720402 (2009) https://doi.org/10.1117/12.810065
Gennady P. Berman, Boris M. Chernobrod, Alan R. Bishop, Vyacheslav N. Gorshkov
Proceedings Volume Micromachining and Microfabrication Process Technology XIV, 720403 (2009) https://doi.org/10.1117/12.812541
Proceedings Volume Micromachining and Microfabrication Process Technology XIV, 720404 (2009) https://doi.org/10.1117/12.809715
Proceedings Volume Micromachining and Microfabrication Process Technology XIV, 720405 (2009) https://doi.org/10.1117/12.815170
Namit Singh, Horacio V. Estrada
Proceedings Volume Micromachining and Microfabrication Process Technology XIV, 720406 (2009) https://doi.org/10.1117/12.815203
E. M. Campo, M. J. Lopez-Martinez, E. Fernández, E. Ibañez, L. Barros, C. Nogues, J. Esteve, J. A. Plaza
Proceedings Volume Micromachining and Microfabrication Process Technology XIV, 720407 (2009) https://doi.org/10.1117/12.809427
Process: Lasers, Milling, CMP
Kevin L. Lin, Kanti Jain
Proceedings Volume Micromachining and Microfabrication Process Technology XIV, 720409 (2009) https://doi.org/10.1117/12.809235
Chwan-Huei Tsai, Wei-Han Chang
Proceedings Volume Micromachining and Microfabrication Process Technology XIV, 72040A (2009) https://doi.org/10.1117/12.809728
M. Malinauskas, V. Purlys, M. Rutkauskas, R. Gadonas
Proceedings Volume Micromachining and Microfabrication Process Technology XIV, 72040C (2009) https://doi.org/10.1117/12.811125
Fritz Klocke, Fernando Quito, Kristian Arntz, Alexandre Souza
Proceedings Volume Micromachining and Microfabrication Process Technology XIV, 72040D (2009) https://doi.org/10.1117/12.808554
Special Session on CAD
Proceedings Volume Micromachining and Microfabrication Process Technology XIV, 72040J (2009) https://doi.org/10.1117/12.807407
Poster Session
Proceedings Volume Micromachining and Microfabrication Process Technology XIV, 72040N (2009) https://doi.org/10.1117/12.808601
Myoung-Kun Leem, Jin-Uk Park, Chang-Man Kim, Kyu-Jin Kim, Se-Hyuk Yeom, Woo-Youp Choi, Won-Seok Kang, Jae-Ho Kim, Shin-Won Kang
Proceedings Volume Micromachining and Microfabrication Process Technology XIV, 72040P (2009) https://doi.org/10.1117/12.808673
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