Dr. Paul J. Resnick
SMTS at Sandia National Labs
SPIE Involvement:
Editor | Author
Publications (5)

Proceedings Article | 14 February 2011 Paper
Gregory Nielson, Murat Okandan, Jose Cruz-Campa, Paul Resnick, Mark Wanlass, Peggy Clews, Tammy Pluym, Carlos Sanchez, Vipin Gupta
Proceedings Volume 7927, 79270P (2011) https://doi.org/10.1117/12.876422
KEYWORDS: Silicon, Solar cells, Gallium arsenide, Etching, Semiconducting wafers, Crystals, Metals, Photomasks, Computer aided design, Photovoltaics

Proceedings Article | 16 January 2003 Paper
Matthew Hankins, Paul Resnick, Peggy Clews, Thomas Mayer, David Wheeler, Danelle Tanner, Richard Plass
Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.478206
KEYWORDS: Coating, Microelectromechanical systems, Silicon, Humidity, Nitrogen, Self-assembled monolayers, Liquids, Semiconducting wafers, Molecules, Oxides

Proceedings Article | 16 January 2003 Paper
Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.478208
KEYWORDS: Diffusion, Microelectromechanical systems, Liquids, Carbon monoxide, Carbon dioxide, Etching, Interfaces, Process modeling, Semiconducting wafers, Capillaries

Proceedings Article | 2 October 2001 Paper
Paul Resnick, Seethambal Mani
Proceedings Volume 4558, (2001) https://doi.org/10.1117/12.443010
KEYWORDS: Tungsten, Oxides, Etching, Liquids, Semiconducting wafers, Silicon, Microelectromechanical systems, Vapor etching, HF etching, Plasma

Proceedings Article | 2 October 2001 Paper
Paul Resnick, Peggy Clews
Proceedings Volume 4558, (2001) https://doi.org/10.1117/12.443011
KEYWORDS: Carbon monoxide, Liquids, Semiconducting wafers, Microelectromechanical systems, Silicon, Interfaces, Capillaries, Particles, Data modeling, Contamination

Proceedings Volume Editor (7)

SPIE Conference Volume | 25 March 2014

SPIE Conference Volume | 26 March 2013

SPIE Conference Volume | 19 March 2012

SPIE Conference Volume | 10 February 2011

SPIE Conference Volume | 10 February 2010

Showing 5 of 7 publications
Conference Committee Involvement (7)
Micromachining and Microfabrication Process Technology XIX
5 February 2014 | San Francisco, California, United States
Micromachining and Microfabrication Process Technology XVIII
5 February 2013 | San Francisco, California, United States
Micromachining and Microfabrication Process Technology XVII
25 January 2012 | San Francisco, California, United States
Micromachining and Microfabrication Process Technology XVI
25 January 2011 | San Francisco, California, United States
Micromachining and Microfabrication Process Technology XV
26 January 2010 | San Francisco, California, United States
Showing 5 of 7 Conference Committees
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