Author Affiliations +
Frederic Lazzarino,1 Sara Paolillo,1 Anthony Peter,1 David De Roest,2 TaeGeun Seong,2 Yizhi Wu,2 Stefan Decoster,1 Vito Rutigliani,1 Gian Francesco Lorusso,1 Vassilios Constantoudis,3,4 Sven Van Elshocht,1 Daniele Piumi,1 Kathy Barla1
1IMEC (Belgium)
2ASM Belgium N.V. (Belgium)
3National Ctr. for Scientific Research Demokritos (Greece)
4Nanometrisis P. C. (Greece)