Optical performances of new materials in the EUV spectral range: metrology, methods and results

Paola Zuppella; Ahmed E. H. Gaballah; Nadeem Ahmed; Kety Jimenez; Piergiorgio Nicolosi

doi:10.1117/12.2525893

26 April 2019 Optical performances of new materials in the EUV spectral range: metrology, methods and results

Paola Zuppella, Ahmed E. H. Gaballah, Nadeem Ahmed, Kety Jimenez, Piergiorgio Nicolosi

Proceedings Volume 11032, EUV and X-ray Optics: Synergy between Laboratory and Space VI; 110320B (2019) https://doi.org/10.1117/12.2525893
Event: SPIE Optics + Optoelectronics, 2019, Prague, Czech Republic

Abstract

The setting up of experimental techniques, the synergic use of ellipsometry systems and synchrotron light sources are pivotal in the characterization and optimization of thin films devoted to EUV–VUV applications. The present manuscript will go through the research methods and the results obtained at CNR–IFN laboratories, by explaining the approaches adopted on the study of novel materials for the development of high throughputs EUV–VUV transmission filters, reflective coatings and phase retarders.

Citation Download Citation

Paola Zuppella, Ahmed E. H. Gaballah, Nadeem Ahmed, Kety Jimenez, and Piergiorgio Nicolosi "Optical performances of new materials in the EUV spectral range: metrology, methods and results", Proc. SPIE 11032, EUV and X-ray Optics: Synergy between Laboratory and Space VI, 110320B (26 April 2019); https://doi.org/10.1117/12.2525893

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