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2 March 2022 High performance multi-junction VCSELs for LiDAR applications
Heng Liu, Pei Miao, Yao Xiao, Chang Liu, Zhicheng Zhang, Jun Wang
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Proceedings Volume 12020, Vertical-Cavity Surface-Emitting Lasers XXVI; 1202005 (2022) https://doi.org/10.1117/12.2609601
Event: SPIE OPTO, 2022, San Francisco, California, United States
Abstract
High power density VCSELs are attracting attentions in the field of LiDAR applications. Multi-junction VCSEL is the key technology to obtain high power density. High slope efficiency, high filling factor and small divergence angle are the straight-forward research directions to realize this high performance multi-junction VCSEL array. We optimize the epitaxial design and fabrication process, such as tunnel junction, oxidation layer and array layout. The progress on high performance multi-junction VCSEL array emitting around 940 nm is reported. Selectively oxidized, top-emitting VCSEL emitter array with 59.7% power conversion efficiency and slope efficiency of 8.3 W/A are developed as the basic laser source targeting at the LiDAR applications. The fabricated VCSEL array devices with emitting area of 234*250 um2 exhibit power density higher than 1800 W/mm2 and divergence angle lower than 21 degree (1/e2) with 15A peak current, 10kHz 10 nano-second pulsed (FWHM) driver.
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Heng Liu, Pei Miao, Yao Xiao, Chang Liu, Zhicheng Zhang, and Jun Wang "High performance multi-junction VCSELs for LiDAR applications", Proc. SPIE 12020, Vertical-Cavity Surface-Emitting Lasers XXVI, 1202005 (2 March 2022); https://doi.org/10.1117/12.2609601
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KEYWORDS
Vertical cavity surface emitting lasers
LIDAR
Oxidation
Semiconducting wafers
Photonics
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